ABSTRACT

By using the two-dimensional quasicontinuum method, the nanoindentation process on a single crystal copper thin film with surface roughness is simulated to study the effect of surface morphology on the measurements of mechanical parameters. The nanohardness and elastic modulus are calculated according to Oliver-Pharr's method. The obtained results show a good agreement with relevant theoretical and experimental results. It is found that surface roughness has a significant influence on both the nanohardness and elastic modulus of thin films determined from nanoindentation tests. The effect of such factors as the indenter size, indentation depth and surface morphology are also examined. To rule out the influence of surface morphology, the indentation depth should be much greater than the characteristic size of surface roughness and a reasonable indenter size should be chosen. This study is helpful for identifying the mechanical parameters of rough thin films by nanoindentation test and designing nanoindentation experiments.